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Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components. exhibit exquisite gravimetric sensitivities which have greatly advanced the bio/chemical sensor technologies in the past two decades. This paper reviews the development of integrated MEMS/NEMS resonators for bio/chemical sensing applications mainly in air and liquid. Dif... https://www.drcristinosuarez.com/

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